Volltext-Downloads (blau) und Frontdoor-Views (grau)
  • search hit 10 of 11
Back to Result List

Laser ablation: a supporting technique to micromachining of SiC

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Metadaten
Author:Gabriel Vanko, Johann Zehetner, Pavlina Choleva, Tibor Lalinský, Peter Hudek
DOI:https://doi.org/10.1109/ASDAM.2012.6418518
Parent Title (English):ASDAM 2012. Conference proceedings. The ninth international conference on advanced semiconductor devices and microsystems. Smolenice (Slovakia). November 11-15, 2012
Publisher:IEE
Place of publication:Piscataway, NJ
Editor:Štefan Haščík, Jozef Osvald
Document Type:Conference Proceeding
Language:English
Year of publication:2012
Release Date:2018/11/22
First Page:259
Last Page:262
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Zehetner, Johann