- search hit 1 of 1
Femtosecond laser processing of membranes for sensor devices on different bulk materials
Author: | Johann ZehetnerORCiD, Gabriel Vanko, Jaroslav Dzuba, Tibor Lalinsky |
---|---|
DOI: | https://doi.org/10.15598/aeee.v15i3.2033 |
Parent Title (English): | Advances in Electrical and Electronic Engineering |
Document Type: | Article |
Language: | English |
Year of publication: | 2017 |
Release Date: | 2018/11/22 |
Volume: | 15. Jg. |
Issue: | H. 3 |
First Page: | 561 |
Last Page: | 568 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Zehetner, Johann |