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Minimizing the surface roughness for silicon ablation with ultrashort laser pulses

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Author:Matthias Domke, Giovanni Piredda, Johann Zehetner, Sandra Stroj
DOI:https://doi.org/10.2961/jlmn.2016.01.0019
Parent Title (English):JLMN - Journal of Laser Micro/Nanoengineering
Document Type:Article
Language:English
Year of publication:2016
Release Date:2018/11/22
Volume:11. Jg.
Issue:H. 1
First Page:100
Last Page:103
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Domke, Matthias
Piredda, Giovanni
Stroj, Sandra
Zehetner, Johann