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Laser ablation: a supporting technique to micromachining of SiC

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Author:Gabriel Vanko, Johann Zehetner, Pavlina Choleva, Tibor Lalinský, Peter Hudek
Parent Title (English):ASDAM 2012. Conference proceedings. The ninth international conference on advanced semiconductor devices and microsystems. Smolenice (Slovakia). November 11-15, 2012
Place of publication:Piscataway, NJ
Editor:Štefan Haščík, Jozef Osvald
Document Type:Conference Proceeding
Year of publication:2012
Release Date:2018/11/22
First Page:259
Last Page:262
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Zehetner, Johann