Minimizing the surface roughness for silicon ablation with ultrashort laser pulses
Author: | Matthias Domke, Giovanni Piredda, Johann ZehetnerORCiD, Sandra StrojORCiD |
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Parent Title (English): | Proceedings of LAMP2015 - the 7th International Congress on Laser Advanced Materials Processing |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2015 |
Release Date: | 2018/11/22 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Forschung / Josef Ressel Zentrum für Materialbearbeitung | |
Publicationlist: | Domke, Matthias |
Piredda, Giovanni | |
Stroj, Sandra | |
Zehetner, Johann |