Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors
Author: | Johann ZehetnerORCiD, Stanislav Kraus, Michal Lucki, Gabriel Vanko, Jaroslav Dzuba, Tibor Lalinsky |
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DOI: | https://doi.org/10.1007/s00542-016-2887-2 |
ISSN: | 0946-7076 |
ISSN: | 1432-1858 |
Parent Title (English): | Microsystem Technologies |
Document Type: | Article |
Language: | English |
Year of publication: | 2016 |
Release Date: | 2018/11/22 |
Volume: | 22. Jg. |
Issue: | H. 7 |
First Page: | 1883 |
Last Page: | 1892 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Zehetner, Johann |