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The combination of direct and confined laser ablation mechanisms for the selective structuring of thin silicon nitride layers

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Author:Stephan Rapp, Gerrit Heinrich, Matthias Domke, Heinz P. Huber
DOI:https://doi.org/10.1016/j.phpro.2014.08.011
Parent Title (English):8th International Conference on Laser Assisted Net Shape Engineering LANE 2014
Document Type:Conference Proceeding
Language:English
Year of publication:2014
Release Date:2018/11/22
Tag:Pump-probe microscopy; SiNx thin films; confined laser ablation
Volume:o.Jg.
First Page:998
Last Page:1006
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Domke, Matthias