Micro-machining of PMN-PT crystals with ultrashort laser pulses
- Lead–magnesium niobate lead titanate (PMN-PT) has been proven as an excellent material for sensing and actuating applications. The fabrication of advanced ultra-small PMN-PT-based devices relies on the availability of sophisticated procedures for the micro-machining of PMN-PT thin films or bulk substrates. Approaches reported up to date include chemical etching, excimer laser ablation, and ion milling. To ensure an excellent device performance, a key mandatory feature for a micro-machining process is to preserve as far as possible the crystalline quality of the substrates; in other words, the fabrication method must induce a low density of cracks and other kind of defects. In this work, we demonstrate a relatively fast procedure for the fabrication of high-quality PMN-PT micro-machined actuators employing green femtosecond laser pulses. The fabricated devices feature the absence of extended cracks and well-defined edges with relatively low roughness, which is advantageous for the further integration of nanomaterials onto the piezoelectric actuators.
Author: | Giovanni Piredda, Sandra StrojORCiD, Dorian Ziss, Julian Stangl, Rinaldo Trotta, Javier Martin-Sanchez, Armando Rastelli |
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DOI: | https://doi.org/10.1007/s00339-019-2460-9 |
Parent Title (English): | Applied Physics A |
Document Type: | Article |
Language: | English |
Year of publication: | 2019 |
Release Date: | 2020/01/28 |
Volume: | 125. Jg. |
Issue: | H. 3 |
Article Number: | 201 |
Number of pages: | 11 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
DDC classes: | 600 Technik, Medizin, angewandte Wissenschaften |
Open Access?: | ja |
Peer review: | wiss. Beitrag, peer-reviewed |
Publicationlist: | Piredda, Giovanni |
Stroj, Sandra | |
Licence (German): | ![]() |