Innovative method to suppress local geometry distortions for fabrication of interdigitated electrode arrays with nano gaps
Author: | Stefan Partel, Gerald Urban |
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Parent Title (English): | Optical Microlithography. 23–25 February 2016. San Jose, California, United States |
Publisher: | SPIE |
Place of publication: | Bellingham, Wash. |
Editor: | Andreas Erdmann, Jongwook Kye |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2016 |
Release Date: | 2018/11/22 |
Number of pages: | 8 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Partel, Stefan |