Fabrication of passive and active photonic coupling structures using fs-laser ablation
- Femtosecond laser ablation on Si generates 2D ripple structures, known as laser induced periodic surface structures (LIPSS) and pinholes. We fabricated membranes with 20 to 50 μm thickness perforated by an array of tapered pinholes up to 5 μm in diameter and 10 to 20 μm spacing. Within several micrometer the pinholes transform into hollow photonic waveguides with constant diameter from 1μm to 2μm. Such structures offer a 3D photonic coupling device for polymer Y-branch- and MMI-splitter. We measured a considerable change of electrical resistivity for 500 ppm H2 in air using Si/SiO2/TiO2 substrates with 2D LIPSS. We propose to investigate 3D waveguide arrays also for photonic-chemical sensors.
Author: | Johann ZehetnerORCiD, Dana SeyringerORCiD, Stanislava SerecunovaORCiD, Peter Gaso, Dusan Pudis, Ivan Hotovy, Miroslav Mikolasek, Heinz Seyringer |
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ISBN: | 978-80-554-1806-3 |
Parent Title (English): | Proceedings of ADEPT 2021. 9th International Conference on Advances in Electronic and Photonic Technologies. Podbanske, High Tatras, Slovakia. September 20-23, 2021 |
Publisher: | University of Zilina in EDIS-Publishing Centre of UZ |
Place of publication: | Zilina |
Editor: | Dano Jandura, Petra Maniakova, Ivana Lettrichova, Jaroslav Kovac, Jr. |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2021 |
Release Date: | 2021/12/09 |
Tag: | Coupling structure; Fs-laser ablation |
First Page: | 255 |
Last Page: | 258 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
DDC classes: | 500 Naturwissenschaften und Mathematik |
Open Access?: | nein |
Peer review: | wiss. Beitrag, nicht peer-reviewed |
Publicationlist: | Seyringer, Dana |
Zehetner, Johann | |
Seyringer, Heinz |