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US 2018/0106749 A1. Electrode structure and method of manufacturing an electrode structure. 19.04.2018

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Author:Stefan Partel, Stephan Kasemann, Can Dincer, Jochen Kieninger, Gerald Urban
URL:https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180419&DB=EPODOC&CC=US&NR=2018106749A1#
Date:16.04.2020
Document Type:Other
Language:English
Year of publication:2018
Release Date:2019/07/09
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Kasemann, Stephan
Partel, Stefan