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Preparation of laser induced periodic surface structures for gas sensing thin films and gas sensing verification of a NiO based sensor structure

  • This study presents different approaches to increase the sensing area of NiO based semiconducting metal oxide gas sensors. Micro- and nanopatterned laser induced periodic surface structures (LIPSS) are generated on silicon and Si/SiO2 substrates. The surface morphologies of the fabricated samples are examined by FE SEM. We select the silicon samples with an intermediate Si3N4 layer due to its superior isolation quality over the thermal oxide for evaluating the hydrogen and acetone sensitivity of a NiO based test sensor.

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Author:Ivan Hotovy, Johann Zehetner, Vlastimil Rehacek, Miroslav Mikolasek, Stanislava Serecunova, Dana Seyringer, Fadi Dohnal
DOI:https://doi.org/10.2478/jee-2024-0004
Parent Title (English):Journal of Electrical Engineering
Document Type:Article
Language:English
Year of publication:2024
Release Date:2024/02/28
Tag:gas sensing; laser ablation; sensor
Volume:75
Issue:1
Number of pages:5
First Page:24
Last Page:28
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
DDC classes:600 Technik, Medizin, angewandte Wissenschaften
JEL-Classification:Z Other Special Topics
Open Access?:ja
Peer review:wiss. Beitrag, peer-reviewed
Publicationlist:Seyringer, Dana
Zehetner, Johann
Dohnal, Fadi
Licence (German):License LogoCreative Commons - CC BY - NC - ND - 4.0 International - Attribution - NonCommercial –NoDerivs - Namensnennung - Nicht kommerziell - Keine Bearbeitungen