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Egle, Bernadette (3)
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2017
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Forschungszentrum Mikrotechnik
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Josef Ressel Zentrum für Materialbearbeitung
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Ultrafast-laser dicing of thin silicon wafers: strategies to improve front- and backside breaking strength
(2017)
Domke, Matthias
;
Egle, Bernadette
;
Stroj, Sandra
;
Bodea, Marius
;
Schwarz, Elisabeth
;
Fasching, Gernot
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