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Author
Merz, Robert (1)
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Year of publication
2006
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Article
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Forschungszentrum Mikrotechnik
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English
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Laser beam machining (1)
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Laser micro machining of 3C-SiC single crystals
(2006)
Zoppel, Sandra
;
Farsari, Maria
;
Merz, Robert
;
Zehetner, Johann
;
Stangl, Günther
;
Reider, Georg A.
;
Fotakis, Costas
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