Deutsch
Open Access
Home
Search
Browse
Publish
FAQ
Volltext-Downloads (blau) und Frontdoor-Views (grau)
Schließen
Refine
Author
Motzek, Kristian (2)
(remove)
Year of publication
2011 (2)
(remove)
Document Type
Article
(1)
Part of a Book
(1)
Institute
Forschungszentrum Mikrotechnik
(2)
Language
English
(2)
Has Fulltext
no
(2)
Is part of the Bibliography
yes
(2)
2
search hits
1
to
2
Export
BibTeX
CSV
Marc21
RIS
10
10
20
50
100
Sort by
Year
Year
Title
Title
Author
Author
Fabrication process development for a high sensitive electrochemical IDA sensor
(2011)
Partel, Stefan
;
Mayer, Markus
;
Hudek, Peter
;
Dincer, Can
;
Kieninger, Jochen
;
Urban, Gerhard A.
;
Motzek, Kristian
;
Matay, Ladislav
Numerical optimization of illumination and mask layout for the enlargement of process windows and for the control of photoresist profiles in proximity printing
(2011)
Motzek, Kristian
;
Partel, Stefan
;
Vogler, Uwe
;
Erdmann, Andreas
1
to
2