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Author
Heinrich, Gerrit (1)
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Year of publication
2014
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Conference Proceeding
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Forschungszentrum Mikrotechnik
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English
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Pump-probe microscopy
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SiNx thin films
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confined laser ablation
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The combination of direct and confined laser ablation mechanisms for the selective structuring of thin silicon nitride layers
(2014)
Rapp, Stephan
;
Heinrich, Gerrit
;
Domke, Matthias
;
Huber, Heinz P.
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