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Author
Andok, Robert
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Barák, V.
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Hudek, Peter
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Konečnikova, I.
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Kostič, Ivan
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Matay, Ladislav
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Partel, Stefan
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Ritomský, A.
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Year of publication
2010
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Forschungszentrum Mikrotechnik
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English
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material optimization (1)
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Material optimization of the alignment marks for the EBDW lithography
(2010)
Matay, Ladislav
;
Andok, Robert
;
Barák, V.
;
Ritomský, A.
;
Konečnikova, I.
;
Kostič, Ivan
;
Partel, Stefan
;
Hudek, Peter
1
to
1