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Parametric anti-resonance is a phenomenon that occurs in systems with at least two degrees of freedom; this can be achieved by periodically exciting some parameters of the system. The effect of this properly tuned periodicity is to increase the dissipation in the system, which leads to a raising in the effective damping of vibrations. This contribution presents the design of an open-loop control to reduce the settling time using the anti-resonance concept. The control signal consists of a quasi-periodic signal capable of transferring the system’s oscillations from one mode to another mode of the system. The general averaging technique is used to characterize the dynamics, particularly the so-called slow dynamics of motion. With this analysis, the control signal is designed for the potential application of a microelectromechanical sensor arrangement; for this specific example, up to 96.8% reduction of settling time is achieved.
By a simple femtosecond laser process, we fabricated metal-oxide/gold composite films for electrical and optical gas sensors. We designed a dripple wavelength AWG-spectrometer, matched to the plasma absorption wavelength region of the composite films. H2/CO absorptions fit well with the AWG design for multi gas detection sensor arrays
The main aims of this work are the validation of the developed process of gluing a single-mode optical fiber array with a photonic chip and the selection of a more suitable adhesive from the two adhesives being compared. An active alignment system was used for adjusting the two optical fiber arrays to a photonics chip. The gluing was done by two compared UV curable adhesives applied in the optical path. The insertion losses of glued coupling were measured and investigated at two discrete wavelengths 1310 nm and 1550 nm during temperature testing in the climatic chamber according to Telcordia GR_1209_Corei04 [3]. The measurement, investigation, and comparison of insertion losses of the glued coupling at the spectral band from 1530 nm to 1570 nm were done immediately after gluing process and after three temperature cycles in the climatic chamber with one month delay.
In this paper, a 256-channel, 10-GHz arrayed waveguide gratings demultiplexer for ultra-dense wavelength division multiplexing was designed using an in-house developed tool called AWG-Parameters. The AWG demultiplexer was designed for a central wavelength of 1550 nm and the structure was simulated in PHASAR tool from Optiwave. Two different AWG designs were developed and the influence of the design parameters on the AWG performance was studied.
Design, simulation, and optimization of the 1×4 optical three-dimensional multimode interference splitter using IP-Dip polymer as a core and polydimethylsiloxane (PDMS) Sylgard 184 as a cladding is demonstrated. The splitter was simulated by using beam propagation method in BeamPROP simulation module of RSoft photonic tool and optimized for an operating wavelength of 1.55 μm . According to the minimum insertion loss, the dimensions of the splitter were optimized for a waveguide with a core size of 4×4 μm2 . The objective of the study is to create the design for fabrication by three-dimensional direct laser writing optical lithography.
Semiconducting metal oxides are widely used for solar cells, poto-catalysis, bio-active materials and gas sensors. Besides the material properties of the used semiconductor,the specific surface topology of the sensor determines the device performance. We investigate the preparation and transfer suitable metals onto LIPPS structures on glass for gas sensing applications.
Deep etched structures in GaAs with high aspect ratio have promising applications in optoelectronics and MEMS devices. The key factors in their fabrication process are the choosing of proper mask material and etching conditions which results in high selectivity and an anisotropic etch profile with smooth sidewalls. In this work, we studied several types of mask materials (Al, Ni, Cr, SiO2) for deep reactive ion etching of GaAs using inductively coupled plasma system. Thus, several sets of experiments were performed with varying gas mixture, pressure and ICP/RF power. As a result, we find optimized conditions and minimal thickness of mask material for achieving deep etched (>140 m) GaAs structures.
Various carbon (nano-) forms, so-called allotropes, have become one of the most supporting activities in fundamental and applied research trends. Therefore, a universal deposition process capable of “adjusting” system parameters in one “deposition chamber” is highly demanding. Here, we present a low-pressure large area deposition system combining radiofrequency (RF) and microwave (MW) plasma in one chamber in different configurations, which offers a wide deposition window for the growth of sp2 carbon (carbon nanotubes, amorphous carbon), a mixture of sp2 and sp3 (diamond-like films) and pure sp3 carbon represented by diamond films. We will show that not only the type of plasma source (RF vs. MW) but also the gas mixture and plasma chemistry are crucial parameters for the controllable and reproducible growth of these allotropes at temperatures from 250 to 800 °C.
The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We innovated specific laser ablation techniques to fabricate membranes and cantilevers made of SiC or nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates by microwave chemical vapour deposition (MWCVD). We started research to generate surface moulds to grow corrugated diamond films for membranes and cantilevers. A software tool was developed to support the design of micromechanical cantilevers. We can measure deformation and resonant frequency of diamond cantilevers and identify the global mechanical properties. A benchmark against finite element simulations enables an inverse identification of the specific system parameters and simplifies the characterization procedure.
The properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 μm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.