Deutsch
Open Access
Home
Search
Browse
Publish
FAQ
Volltext-Downloads (blau) und Frontdoor-Views (grau)
Schließen
Refine
Author
Domke, Matthias
(1)
Heinrich, Gerrit
(1)
Huber, Heinz P.
(1)
Rapp, Stephan
(1)
Year of publication
2014
(1)
Document Type
Conference Proceeding
(1)
Institute
Forschungszentrum Mikrotechnik
(1)
Language
English
(1)
Has Fulltext
no
(1)
Is part of the Bibliography
yes
(1)
Keywords
confined laser ablation (1)
(remove)
1
search hit
1
to
1
Export
BibTeX
CSV
Marc21
RIS
20
10
20
50
100
The combination of direct and confined laser ablation mechanisms for the selective structuring of thin silicon nitride layers
(2014)
Rapp, Stephan
;
Heinrich, Gerrit
;
Domke, Matthias
;
Huber, Heinz P.
1
to
1