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The properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 μm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.
The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We innovated specific laser ablation techniques to fabricate membranes and cantilevers made of SiC or nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates by microwave chemical vapour deposition (MWCVD). We started research to generate surface moulds to grow corrugated diamond films for membranes and cantilevers. A software tool was developed to support the design of micromechanical cantilevers. We can measure deformation and resonant frequency of diamond cantilevers and identify the global mechanical properties. A benchmark against finite element simulations enables an inverse identification of the specific system parameters and simplifies the characterization procedure.
Femtosecond laser ablation on Si generates 2D ripple structures, known as laser induced periodic surface structures (LIPSS) and pinholes. We fabricated membranes with 20 to 50 μm thickness perforated by an array of tapered pinholes up to 5 μm in diameter and 10 to 20 μm spacing. Within several micrometer the pinholes transform into hollow photonic waveguides with constant diameter from 1μm to 2μm. Such structures offer a 3D photonic coupling device for polymer Y-branch- and MMI-splitter. We measured a considerable change of electrical resistivity for 500 ppm H2 in air using Si/SiO2/TiO2 substrates with 2D LIPSS. We propose to investigate 3D waveguide arrays also for photonic-chemical sensors.
By a simple femtosecond laser process, we fabricated metal-oxide/gold composite films for electrical and optical gas sensors. We designed a dripple wavelength AWG-spectrometer, matched to the plasma absorption wavelength region of the composite films. H2/CO absorptions fit well with the AWG design for multi gas detection sensor arrays
Black titanium dioxide in situ generated on femtosecond laser induced periodic surface structures
(2018)
Semiconducting metal oxides are widely used for solar cells, poto-catalysis, bio-active materials and gas sensors. Besides the material properties of the used semiconductor,the specific surface topology of the sensor determines the device performance. We investigate the preparation and transfer suitable metals onto LIPPS structures on glass for gas sensing applications.
Oral applications of ultra-short laser pulses - a new approach for gentle and painless treatment?
(2006)
Production and tribological characterization of tailored laser-induced surface 3D microtextures
(2019)
Silicon nanophotonics
(2013)
Investigations on mechanical stability of laser machined optical fibre tips for medical application
(2019)
Light delivery is a challenging task, when it comes to medical applications. The light is guided through optical fibers from the light source towards the treatment region. In case of interstitial light application, the light has to be decoupled from the fibre and spread to the surrounding tissue. To reach larger tissue volumes, this can be either obtained by adding a scattering volume to the tip of the fibre, or by directly modifying the optical fibre itself in order to break the total reflection within the fibre core. Such modifications can be either on the fibre surface itself or internally in the fibre core. One approach to obtain the fibre structuring could be laser induced surface roughening using an ultrafast laser source. While using volume scattering as diffusor at the fibre tip is currently the gold standard for non-thermal applications (< 0.3W/cm), the decoupling of high power laser intensities for thermal treatment options is still challenging. Structuring the fibre core itself usually is related with a loss of mechanical stability. As fibre breakage and potential loss within the human body can have serious consequences, the mechanical stability is one of the quality criterion in diffuser manufacturing. Therefore, investigations about the mechanical stability of laser manufactured optical fibre diffusers are needed.
In order to evaluate the mechanical stability, a 4-point as well as a 2-point breaking test were developed. Different fibre diffusers, based on volume or surface scattering, were manufactured using fs-laser ablation techniques and its breaking strengths were investigated.
It could be shown that for surface fibre modifications, the mechanical stability reduces with increasing defect depth. The stability significantly drops when the laser ablation was performed in the thermal energy range. Volume scattering modified fibres only showed a slight reduction in stability compared to un-machined fibres.
In conclusion, internal fibre modification seems to be the most promising method to establish optical fibre diffusers, which are capable of several watts of emission power, while preserving its mechanical strength.
Ultrafast-laser manufacture of radially emitting optical fiber diffusers for medical applications
(2018)
Interstitial photodynamic therapy (iPDT) treats malignant brain cancer cells by irradiation with low power laser light. The light is guided into the human body by diffuse emitting fibers. This study targets the light distribution of optical diffusers within the brain tissue. It was shown, that by submerging an optical diffuser into human brain phantom, its radiation profile measured in air converges towards a Gaussian distribution with increasing phantom depth. A camera method using digital averaging filters as well as an integrating sphere setup, both, smoothing the diffuser radiation profile were applied onto the evaluated diffuser.
In this paper, a 256-channel, 10-GHz arrayed waveguide gratings demultiplexer for ultra-dense wavelength division multiplexing was designed using an in-house developed tool called AWG-Parameters. The AWG demultiplexer was designed for a central wavelength of 1550 nm and the structure was simulated in PHASAR tool from Optiwave. Two different AWG designs were developed and the influence of the design parameters on the AWG performance was studied.
We present 256-channel, 25-GHz AWG designed for ultra-dense wavelength division multiplexing. For the design two in-house developed tools were used: AWG-Parameters tool for the calculation of input design parameters and AWGAnalyser tool, used to evaluate the simulated transmission characteristics. The AWG structure was designed for AWG central wavelength of 1550 nm and simulated with PHASAR tool from Optiwave. To keep the size of AWG structure as small as possible the number of waveguides in the phased array was tested. The simulations show that there is a certain minimum number of phased array waveguides necessary to reach sufficient AWG performance. After optimization, the AWG structure reached 10 cm x 11 cm in size and satisfying optical properties.
Arrayed Waveguide Grating (AWG) is a passive optical component, which have found applications in a wide range of photonic applications including telecommunications and medicine. Silica-on-Silicon (SoS) based AWGs use a low refractive-index contrast between the core (waveguide) and the cladding which leads to some significant advantages such as low propagation losses and low fiber coupling losses between the AWG waveguides and the fibres. Therefore, they are an attractive DWDM solution offering higher channel count technology and good performance characteristics compared to other methods. However, the very low refractive-index contrast means the bending radius of the waveguides needs to be very large (on the order of several millimeters) and may not fall below a particular critical value to suppress bending losses. As a result, silica-based waveguide devices usually have a very large size that limits the integration density of SiO2-based photonic integrated devices. High-index contrast AWGs (such as silicon, silicon nitride or polymer-based waveguide devices) feature much smaller waveguide size compared to low index contrast AWGs. Such compact devices can easily be implemented on a chip and have already found applications in emerging applications such as optical sensors, devices for DNA diagnostics and optical spectrometers for infrared spectroscopy.In this work, we present the design, simulation, technological verification and applications of both, the low-index contrast and high-index contrast AWGs. For telecommunication applications AWG-MUX/Demux with up to 128-channels will be presented. For medical applications the AWG-spectrometer with up to 512-channels will be presented.This work was carried out in the framework of the projects: ADOPT No. SK-AT-20-0012, NOVASiN No. SK-AT-20-0017 and AUTOPIC No. APVV-17-0662 from Slovak research and development agency of Ministry of Education, Science, Research and Sport of the Slovak Republic and No. SK 07/2021 and SK 08/2021 from Austrian Agency for International Cooperation in Education and Research (OeAD-GmbH); and project PASTEL, no. 2020-10-15-001, funded by SAIA.
We present design, simulation and optimization of polymer based 16-channel, 100-GHz AWG designed for central wavelength of 1550 nm. The input design parameters were calculated applying AWG-Parameters tool. The simulations were performed applying a commercial photonic tool PHASAR from Optiwave. The achieved transmission characteristics were evaluated by AWG-Analyzer tool and show a satisfying agreement between designed and simulated AWG optical properties. Finally, the influence of the number of phased array (PA) waveguides on the AWG performance was studied. The results show that there is a certain minimum number of PA waveguides necessary to reach sufficient AWG performance.
We present design of planar 16-channel, 100-GHz multi-mode polymer-based AWG. This AWG was designed for central wavelength of 1550 nm applying AWG-Parameters tool. The AWG structure was created and simulated in the commercial photonic tool PHASAR from Optiwave. Achieved transmission characteristics were evaluated by AWG-Analyzer tool. For the design, multi-mode waveguides having a cross-section of (4x4) µm2 were used. The simulated results show strong worsening of the transmission characteristics in comparison when using single-mode waveguides. Nevertheless, the transmitting channels are clearly separated. The reason for using thicker multi-mode waveguides in the design is possibility to fabricate the AWG structure on polymer basis using direct laser writing lithography.
In this work, we investigated the influence of different etch depths of the rib waveguides on the performance of SiN-based AWGs. For this purpose, an 8-channel 100 GHz AWG was designed for a center wavelength of 850 nm. The design parameters entered were calculated using the AWG-Parameters tool. The simulations were performed with a commercial photonic tool PHASAR from Optiwave. The simulated performance was evaluated using the AWG-Analyzer tool. For the AWG design, we used three identical rib waveguides with different etch depths to simulate possible etch imperfection. The simulations show the wavelength shift and degradation of the AWG performance.
In this paper we present various educational activities with Photonics Explorer, an educational kit developed by the photonics research team B - PHOT at VUB (Vrije Universiteit Brussel) for students at secondary schools. The concept is a ‘lab-in-a-box’ that enables students of the 2 nd and 3 rd grade to do photonics experiments themselves at school with lasers, LEDs, lenses, optical fibers, and other high-tech components. Even though, the kit was developed for the secondary schools, we use experiments from the kit also for some other teaching activities such as lectures at the university, photonics workshops for teachers and children at primary/secondary schools or for events such as children's/youth's university or the night of sciences. In the frame of Austrian based project Phorsch! we have organized most of these activities which will be presented here.