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Domke, Matthias (5)
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2016
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Forschungszentrum Mikrotechnik
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Josef Ressel Zentrum für Materialbearbeitung
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Ultrashort pulse laser dicing of thin Si wafers. The influence of laser-induced periodic surface structures on the backside breaking strength
(2016)
Domke, Matthias
;
Egle, Bernadette
;
Piredda, Giovanni
;
Stroj, Sandra
;
Fasching, Gernot
;
Bodea, Marius
;
Schwarz, Elisabeth
Minimizing the surface roughness for silicon ablation with ultrashort laser pulses
(2016)
Domke, Matthias
;
Piredda, Giovanni
;
Zehetner, Johann
;
Stroj, Sandra
Minimizing the surface roughness for silicon ablation with ultrashort laser pulses
(2015)
Domke, Matthias
;
Piredda, Giovanni
;
Zehetner, Johann
;
Stroj, Sandra
Controlling depth and distance of the hole formations at the bottom of laser-scribed trenches in silicon using fs-pulses
(2015)
Domke, Matthias
;
Egle, Bernadette
;
Piredda, Giovanni
;
Fasching, Gernot
;
Bodea, Marius
;
Schwarz, Elisabeth
Calculating the optimal combination of pulse-to-pulse distance and fluence for scribing and surface ablation with ultrashort pulsed lasers
(2015)
Domke, Matthias
;
Piredda, Giovanni
;
Stroj, Sandra
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