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Using of laser ablation technique in the processing technology of GaN/SiC based MEMS for extreme conditions (2014)

Zehetner, Johann ; Vanko, Gabriel ; Choleva, Pavlina ; Dzuba, Jaroslav ; Ryger, Ivan ; Lalinsky, Tibor

Measurement of the AlGaN/GaN membrane piezoelectric response by pressure loading (2013)

Drzik, Milan ; Dzuba, Jaroslav ; Vanko, Gabriel ; Hudek, Peter ; Choleva, Pavlina ; Ryger, Ivan ; Lalinsky, Tibor

MEMS pressure sensor fabricated by advanced bulk micromachining techniques (2013)

Vanko, Gabriel ; Hudek, Peter ; Zehetner, Johann ; Dzuba, Jaroslav ; Choleva, Pavlina ; Vallo, Martin ; Ryger, Ivan ; Lalinsky, Tibor

Bulk micromachining of SiC substrate for MEMS sensor applications (2013)

Vanko, Gabriel ; Hudek, Peter ; Zehetner, Johann ; Dzuba, Jaroslav ; Choleva, Pavlina ; Kutis, Vladimir ; Vallo, Martin ; Ryger, Ivan ; Lalinsky, Tibor

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4 search hits