Refine
Document Type
- Article (4) (remove)
Institute
Language
- English (4)
Has Fulltext
- no (4)
Is part of the Bibliography
- yes (4)
Keywords
- AlGaN/GaN HEMT (1)
- Bulk micromachining (1)
- LSMO membrane (1)
- Laser ablation (1)
- Log-periodic antenna (1)
- Microbolometer (1)
- Micromachining (1)
- SiC MEMS (1)
- Terahertz radiation (1)