Refine
Document Type
- Conference Proceeding (5) (remove)
Institute
Language
- English (5)
Has Fulltext
- no (5)
Is part of the Bibliography
- yes (5)
Keywords
- EBDW lithography (1)
- Gold (1)
- Lithography (1)
- Nickel (1)
- Resists (1)
- Silicon (1)
- Surfaces (1)
- alignment marks (1)
- deep reactive ion etching (1)
- e-beam lithography (1)