Forschungszentrum Mikrotechnik
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- arrayed waveguide gratings (9)
- Y-branch splitter (6)
- integrated optics (6)
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This paper describes two different designs of 1×8 passive optical splitters. The first splitter consists of cascade arranged directional waveguide branches (Y-branch splitter) with (0.8×0.16) µm2 waveguide cross-section. The second splitter is based on multimode interference occurring in a large MMI coupler, which uses a self-imaging effect for beam propagation, exhibiting the same waveguide core size as a Y-branch splitter. The waveguide channel profile, used in both approaches, is based on a silicon nitride material platform, with a refractive index of core being nc = 1.925 and a refractive index of cladding ncl = 1.4575. The splitters are designed as a planar structure for a medical operating wavelength 850 nm. Design, simulation, and optimization of passive optical components are performed by a commercial photonic software tool BeamPROP simulation engine by RSoft Photonics Suite tool, employing beam propagation method. This work aims to find the minimum physical dimensions of the designed splitters with the satisfactory optical performance. According to the minimum insertion loss and minimum non-uniformity, the optimum length of the splitters is determined. Finally, the optical properties of splitters for both approaches are discussed and compared with each other.
A new software tool, called AWG-Wuckler, is developed to calculate geometric parameters of arrayed waveguide grating structures for telecommunication and medical applications. These parameters are crucial for a AWG layout which will be created and simulated using commercial photonic design tools. The design process of AWG is very complex because its geometric dimensions depend on a large number of input design parameters and other input design parameters. Often geometric constraints require an adjustment of the input design parameters and vice versa. Calculation and adjustment of the geometric parameters is a time-consuming process that is currently not fully supported by any commercial photonic tool. AWG-Wuckler tool overcomes this issue and offers a fast and easy to use solution. The tool was already applied in various AWG designs and is technologically well proven.
Deep etched structures in GaAs with high aspect ratio have promising applications in optoelectronics and MEMS devices. The key factors in their fabrication process are the choosing of proper mask material and etching conditions which results in high selectivity and an anisotropic etch profile with smooth sidewalls. In this work, we studied several types of mask materials (Al, Ni, Cr, SiO2) for deep reactive ion etching of GaAs using inductively coupled plasma system. Thus, several sets of experiments were performed with varying gas mixture, pressure and ICP/RF power. As a result, we find optimized conditions and minimal thickness of mask material for achieving deep etched (>140 m) GaAs structures.
The paper shows concepts of optical splitting based on three dimensional (3D) optical splitters based on multimode interference principle. This paper is focused on the design, fabrication and characterization of 3D MMI splitter with formed output waveguides based on IP-Dip polymer for direct application on optical fiber. The MMI optical splitter was simulated and fabricated using direct laser writing process. Output characteristics were characterized by highly resolved near-field scanning optical microscope (NSOM) and compared with 3D MMI splitter without output waveguides.
The properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 μm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.
We present 256-channel, 25-GHz AWG designed for ultra-dense wavelength division multiplexing. For the design two in-house developed tools were used: AWG-Parameters tool for the calculation of input design parameters and AWGAnalyser tool, used to evaluate the simulated transmission characteristics. The AWG structure was designed for AWG central wavelength of 1550 nm and simulated with PHASAR tool from Optiwave. To keep the size of AWG structure as small as possible the number of waveguides in the phased array was tested. The simulations show that there is a certain minimum number of phased array waveguides necessary to reach sufficient AWG performance. After optimization, the AWG structure reached 10 cm x 11 cm in size and satisfying optical properties.
Semiconducting metal oxides are widely used for solar cells, poto-catalysis, bio-active materials and gas sensors. Besides the material properties of the used semiconductor,the specific surface topology of the sensor determines the device performance. We investigate the preparation and transfer suitable metals onto LIPPS structures on glass for gas sensing applications.
Various carbon (nano-) forms, so-called allotropes, have become one of the most supporting activities in fundamental and applied research trends. Therefore, a universal deposition process capable of “adjusting” system parameters in one “deposition chamber” is highly demanding. Here, we present a low-pressure large area deposition system combining radiofrequency (RF) and microwave (MW) plasma in one chamber in different configurations, which offers a wide deposition window for the growth of sp2 carbon (carbon nanotubes, amorphous carbon), a mixture of sp2 and sp3 (diamond-like films) and pure sp3 carbon represented by diamond films. We will show that not only the type of plasma source (RF vs. MW) but also the gas mixture and plasma chemistry are crucial parameters for the controllable and reproducible growth of these allotropes at temperatures from 250 to 800 °C.
In this paper we present various educational activities with Photonics Explorer, an educational kit developed by the photonics research team B - PHOT at VUB (Vrije Universiteit Brussel) for students at secondary schools. The concept is a ‘lab-in-a-box’ that enables students of the 2 nd and 3 rd grade to do photonics experiments themselves at school with lasers, LEDs, lenses, optical fibers, and other high-tech components. Even though, the kit was developed for the secondary schools, we use experiments from the kit also for some other teaching activities such as lectures at the university, photonics workshops for teachers and children at primary/secondary schools or for events such as children's/youth's university or the night of sciences. In the frame of Austrian based project Phorsch! we have organized most of these activities which will be presented here.
Design, simulation, and optimization of the 1×4 optical three-dimensional multimode interference splitter using IP-Dip polymer as a core and polydimethylsiloxane (PDMS) Sylgard 184 as a cladding is demonstrated. The splitter was simulated by using beam propagation method in BeamPROP simulation module of RSoft photonic tool and optimized for an operating wavelength of 1.55 μm . According to the minimum insertion loss, the dimensions of the splitter were optimized for a waveguide with a core size of 4×4 μm2 . The objective of the study is to create the design for fabrication by three-dimensional direct laser writing optical lithography.