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Author
Markovic, Marko
(1)
Motzek, Kristian
(1)
Partel, Stefan
(1)
Urban, Gerald A.
(1)
Year of publication
2022
(1)
2013
(1)
Document Type
Article
(1)
Master's Thesis
(1)
Institute
Forschungszentrum Mikrotechnik
(1)
Language
German
(1)
English
(1)
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yes
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(1)
Keywords
DRM (2)
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Simulation model validation of two common i-line photoresists
(2013)
Partel, Stefan
;
Urban, Gerald A.
;
Motzek, Kristian
1
to
1