Micromachined pressure sensors based on AlGaN/GaN circular HEMT sensing devices. Poster
Author: | Tibor Lalinsky, Peter Hudek, Gabriel Vanko, Pavlina Choleva, Martin Vallo, Milan Drzik, Jaroslav Dzuba, Vladimir Kutis, Ladislav Matay, Ivan Kostic |
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Parent Title (English): | MNE 2011 (Micro- and Nano Engineering Conference), Berlin, Germany, September 19 – 23, 2011 |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2011 |
Release Date: | 2018/11/22 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |