Study of selective wet etching of titanium towards copper in hydrofluoric free etchant
Author: | Volha Matylitskaya, Stefan Partel, Stephan Kasemann |
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Parent Title (English): | Proceedings of the 21st International Conference on Applied Physics of Condensed Matter (APCOM 2015) and of the Scientific Conference on Advanced Fast Reactors. June 24 - 26, 2015. Strbske Pleso, Slovak Republic |
Publisher: | Nakl. STU |
Place of publication: | Bratislava |
Editor: | Jan Vajda, Igor Jamnicky |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2015 |
Release Date: | 2018/11/22 |
First Page: | 272 |
Last Page: | 276 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Kasemann, Stephan |
Matylitskaya, Volha | |
Partel, Stefan |