A simple fabrication process for disposable interdigitated electrode arrays with nanogaps for lab-on-a-chip applications
Author: | Stefan Partel, Stephan Kasemann, Volha Matylitskaya, Christine Thanner, Can Dincer, Gerald Urban |
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DOI: | https://doi.org/10.1016/j.mee.2017.03.014 |
ISSN: | 0167-9317 |
Parent Title (English): | Microelectronic Engineering |
Document Type: | Article |
Language: | English |
Year of publication: | 2017 |
Release Date: | 2018/11/22 |
Tag: | Cycle-olefin polymer (COP); Electrochemical biosensor; Hot embossing; Interdigitated electrode array (IDA); Lab-on-a-chip (LOC) |
Volume: | o.Jg. |
Issue: | Bd. 173 |
First Page: | 27 |
Last Page: | 32 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Kasemann, Stephan |
Matylitskaya, Volha | |
Partel, Stefan |