US 2018/0106749 A1. Electrode structure and method of manufacturing an electrode structure. 19.04.2018
Author: | Stefan Partel, Stephan Kasemann, Can Dincer, Jochen Kieninger, Gerald Urban |
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URL: | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180419&DB=EPODOC&CC=US&NR=2018106749A1# |
Date: | 16.04.2020 |
Document Type: | Other |
Language: | English |
Year of publication: | 2018 |
Release Date: | 2019/07/09 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Kasemann, Stephan |
Partel, Stefan |