Front-side diamond deposition on the GaN membranes
Author: | Tibor Izsak, Gabriel Vanko, Milan Drzik, Stephan Kasemann, Johann ZehetnerORCiD, Marian Vojs, Bohumir Zatko, Stepan Potocky, Alexander Kromka |
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DOI: | https://doi.org/10.1109/ASDAM50306.2020.9393833 |
ISBN: | 978-1-7281-9776-0 |
ISBN: | 978-1-6654-4616-7 |
Parent Title (English): | ASDAM 2020. The 13th International Conference on Advanced Semiconductor Devices and Microsystems. Smolenice Castle, Slovakia. October 11-14, 2020 |
Publisher: | IEEE |
Place of publication: | Piscataway, NJ |
Editor: | Tibor Izsak, Gabriel Vanko |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2020 |
Release Date: | 2022/02/28 |
First Page: | 42 |
Last Page: | 45 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Open Access?: | nein |
Publicationlist: | Kasemann, Stephan |
Zehetner, Johann |