In-situ measurement and characterization of photoresists during development
Author: | Stefan Partel, Markus Mayer, Kristian Motzek |
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Parent Title (English): | SPIE Newsroom |
Document Type: | Article |
Language: | English |
Year of publication: | 2012 |
Release Date: | 2018/11/22 |
Number of pages: | 3 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Partel, Stefan |