Controlling depth and distance of the hole formations at the bottom of laser-scribed trenches in silicon using fs-pulses
Author: | Matthias Domke, Bernadette Egle, Giovanni Piredda, Gernot Fasching, Marius Bodea, Elisabeth Schwarz |
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Parent Title (English): | Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX. 9–12 February 2015. San Francisco, California, United States |
Publisher: | SPIE |
Place of publication: | Bellingham, Wash. |
Editor: | Stephan Roth, Yoshiki Nakata, Beat Neuenschwander, Xianfan Xu |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2015 |
Release Date: | 2018/11/22 |
Volume: | 9350 |
Number of pages: | 6 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Forschung / Josef Ressel Zentrum für Materialbearbeitung | |
Publicationlist: | Domke, Matthias |
Piredda, Giovanni |