MEMS pressure sensor fabricated by advanced bulk micromachining techniques
Author: | Gabriel Vanko, Peter Hudek, Johann ZehetnerORCiD, Jaroslav Dzuba, Pavlina Choleva, Martin Vallo, Ivan Ryger, Tibor Lalinsky |
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Parent Title (English): | Smart sensors, actuators, and MEMS VI. 24-26 April 2013. Grenoble, France |
Publisher: | SPIE |
Place of publication: | Bellingham, Wash. |
Editor: | Ulrich Schmid, Jose Luis Sanchez de Rojas Aldavero, Monika Leester-Schaedel |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2013 |
Release Date: | 2018/11/22 |
Number of pages: | 87632 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Zehetner, Johann |