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Measurement of the AlGaN/GaN membrane piezoelectric response by pressure loading

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Author:Milan Drzik, Jaroslav Dzuba, Gabriel Vanko, Peter Hudek, Pavlina Choleva, Ivan Ryger, Tibor Lalinsky
Parent Title (English):39th International Conference on MNE, 16 to 19 September 2013, London
Document Type:Conference Proceeding
Language:English
Year of publication:2013
Release Date:2018/11/22
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik