Laser ablation: a supporting technique to micromachining of SiC
Author: | Gabriel Vanko, Johann ZehetnerORCiD, Pavlina Choleva, Tibor Lalinský, Peter Hudek |
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DOI: | https://doi.org/10.1109/ASDAM.2012.6418518 |
Parent Title (English): | ASDAM 2012. Conference proceedings. The ninth international conference on advanced semiconductor devices and microsystems. Smolenice (Slovakia). November 11-15, 2012 |
Publisher: | IEE |
Place of publication: | Piscataway, NJ |
Editor: | Štefan Haščík, Jozef Osvald |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2012 |
Release Date: | 2018/11/22 |
First Page: | 259 |
Last Page: | 262 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Zehetner, Johann |