Micro structuring of membranes for sensor devices on different nulk materials by femtosecond laser ablation
| Author: | Johann ZehetnerORCiD, Gabriel Vanko, Jaroslav Dzuba, Tibor Lalinsky, Michal Lucki, Stanislav Kraus |
|---|---|
| Parent Title (English): | Proceedings of ADEPT. 4th International Conference on Advances in Electronic and Photonic Technologies. Tatranska Lomnica, High Tatras, Slovakia. June 20 - 23, 2016 |
| Publisher: | University of Zilina |
| Place of publication: | Zilina |
| Editor: | Jaroslav Kovac, Miroslav Michalka, Sona Kovacova, Daniel Jandura |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of publication: | 2016 |
| Release Date: | 2018/11/22 |
| First Page: | 55 |
| Last Page: | 58 |
| Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
| Publicationlist: | Zehetner, Johann |
