Bulk micromachining of SiC substrate for MEMS sensor applications
Author: | Gabriel Vanko, Peter Hudek, Johann ZehetnerORCiD, Jaroslav Dzuba, Pavlina Choleva, Vladimir Kutis, Martin Vallo, Ivan Ryger, Tibor Lalinsky |
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DOI: | https://doi.org/10.1016/j.mee.2013.01.046 |
ISSN: | 0167-9317 |
Parent Title (English): | Microelectronic Engineering |
Document Type: | Article |
Language: | English |
Year of publication: | 2013 |
Release Date: | 2018/11/22 |
Tag: | AlGaN/GaN HEMT; Bulk micromachining; Laser ablation; SiC MEMS |
Volume: | o. Jg. |
Issue: | Bd. 110 |
First Page: | 260 |
Last Page: | 264 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Zehetner, Johann |