Fabrication process development for a high sensitive electrochemical IDA sensor
Author: | Stefan Partel, Markus Mayer, Peter Hudek, Can Dincer, Jochen Kieninger, Gerhard A. Urban, Kristian Motzek, Ladislav Matay |
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DOI: | https://doi.org/10.1016/j.mee.2012.03.028 |
ISSN: | 0167-9317 |
Parent Title (English): | Microelectronic Engineering |
Document Type: | Article |
Language: | English |
Year of publication: | 2011 |
Release Date: | 2018/11/22 |
Volume: | o.Jg. |
Issue: | Bd. 97 |
First Page: | 235 |
Last Page: | 240 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Partel, Stefan |