Lift-off free fabrication approach for periodic structures with tunable nano gaps for interdigitated electrode arrays
Author: | Stefan Partel, Can Dincer, Stephan Kasemann, Jochen Kieninger, Johannes Edlinger, Gerald Urban |
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DOI: | https://doi.org/10.1021/acsnano.5b06405 |
ISSN: | 1936-0851 |
Parent Title (English): | ACS Nano |
Document Type: | Article |
Language: | English |
Year of publication: | 2015 |
Release Date: | 2018/11/22 |
Volume: | 10. Jg. |
Issue: | H. 1 |
First Page: | 1086 |
Last Page: | 1092 |
Note: | Veröffentlichungsdatum Web: 1. Dezember 2015 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Edlinger, Johannes |
Kasemann, Stephan | |
Partel, Stefan |