Single pulse femtosecond laser ablation of silicon – a comparison between experimental and simulated two-dimensional ablation profiles
Author: | Regina Moser, Matthias Domke, Jan Winter, Heinz Huber, Gerd Marowsky |
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DOI: | https://doi.org/10.1515/aot-2018-0013 |
ISSN: | 2192-8576 |
Parent Title (English): | Advanced Optical Technologies |
Document Type: | Article |
Language: | English |
Year of publication: | 2018 |
Release Date: | 2019/08/01 |
Tag: | femtosecond laser ablation; silicon laser ablation; two-dimensional morphology; two-temperature model |
Volume: | 7. Jg |
Issue: | H. 4 |
First Page: | 255 |
Last Page: | 264 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Forschung / Josef Ressel Zentrum für Materialbearbeitung | |
Publicationlist: | Domke, Matthias |