Fabrication of interdigitated electrode arrays for biosensors by advanced mask aligner lithography
Author: | Stefan Partel |
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Publisher: | Universität |
Place of publication: | Freiburg |
Document Type: | Doctoral Thesis |
Language: | English |
Year of publication: | 2016 |
Release Date: | 2018/11/22 |
Number of pages: | 153 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Partel, Stefan |