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Fabrication of interdigitated electrode arrays for biosensors by advanced mask aligner lithography

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Metadaten
Author:Stefan Partel
Publisher:Universit├Ąt
Place of publication:Freiburg
Document Type:Doctoral Thesis
Language:English
Year of publication:2016
Release Date:2018/11/22
Number og pages:153
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Partel, Stefan