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Stroj, Sandra (2)
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Forschungszentrum Mikrotechnik
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Josef Ressel Zentrum für Materialbearbeitung
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Ultrafast-laser dicing of thin silicon wafers: strategies to improve front- and backside breaking strength
(2017)
Domke, Matthias
;
Egle, Bernadette
;
Stroj, Sandra
;
Bodea, Marius
;
Schwarz, Elisabeth
;
Fasching, Gernot
Ultrashort pulse laser dicing of thin Si wafers. The influence of laser-induced periodic surface structures on the backside breaking strength
(2016)
Domke, Matthias
;
Egle, Bernadette
;
Piredda, Giovanni
;
Stroj, Sandra
;
Fasching, Gernot
;
Bodea, Marius
;
Schwarz, Elisabeth
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