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Semiconducting metal oxides are widely used for solar cells, poto-catalysis, bio-active materials and gas sensors. Besides the material properties of the used semiconductor,the specific surface topology of the sensor determines the device performance. We investigate the preparation and transfer suitable metals onto LIPPS structures on glass for gas sensing applications.
Deep etched structures in GaAs with high aspect ratio have promising applications in optoelectronics and MEMS devices. The key factors in their fabrication process are the choosing of proper mask material and etching conditions which results in high selectivity and an anisotropic etch profile with smooth sidewalls. In this work, we studied several types of mask materials (Al, Ni, Cr, SiO2) for deep reactive ion etching of GaAs using inductively coupled plasma system. Thus, several sets of experiments were performed with varying gas mixture, pressure and ICP/RF power. As a result, we find optimized conditions and minimal thickness of mask material for achieving deep etched (>140 m) GaAs structures.
Various carbon (nano-) forms, so-called allotropes, have become one of the most supporting activities in fundamental and applied research trends. Therefore, a universal deposition process capable of “adjusting” system parameters in one “deposition chamber” is highly demanding. Here, we present a low-pressure large area deposition system combining radiofrequency (RF) and microwave (MW) plasma in one chamber in different configurations, which offers a wide deposition window for the growth of sp2 carbon (carbon nanotubes, amorphous carbon), a mixture of sp2 and sp3 (diamond-like films) and pure sp3 carbon represented by diamond films. We will show that not only the type of plasma source (RF vs. MW) but also the gas mixture and plasma chemistry are crucial parameters for the controllable and reproducible growth of these allotropes at temperatures from 250 to 800 °C.
The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We innovated specific laser ablation techniques to fabricate membranes and cantilevers made of SiC or nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates by microwave chemical vapour deposition (MWCVD). We started research to generate surface moulds to grow corrugated diamond films for membranes and cantilevers. A software tool was developed to support the design of micromechanical cantilevers. We can measure deformation and resonant frequency of diamond cantilevers and identify the global mechanical properties. A benchmark against finite element simulations enables an inverse identification of the specific system parameters and simplifies the characterization procedure.
The properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 μm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.
Purpose: Although there is an apparent potential in using data for advanced services in manufacturing environments, SMEs are reluctant to share data with their ecosystem partners, which prevents them from leveraging this potential. Therefore, the purpose of this paper is to analyse the reasons behind these resistances. The argumentation paves the way for elaborating countermeasures that are adequate for the specific situation and the typical capabilities of SMEs.
Design/Methodology/Approach: The analysis is based on literature research and in-depth interviews with management representatives of 15 companies in manufacturing service ecosystems. Half of these are manufacturers and the other half technology or service providers for manufacturers. They are SMEs or partly larger companies operating in structures that are typical for SMEs.
Findings: Data sharing hurdles are investigated in the five dimensions, 1. quantifying the value of data, 2. willingness to share data and trust, 3. organizational culture and mindset, 4. legal aspects, and 5. security and privacy. The ability to quantify the value of data is a necessary but not sufficient precondition for data sharing, which must be enabled by adequate measures in the other four dimensions.
Originality/Value: The findings of this empirical study and the solution approach provide an SME-specific framework to analyze hurdles that must be overcome for sharing data in an ecosystem.
Manufacturing SMEs can apply the framework to overcome the hurdles by specific insights and solution approaches. Furthermore, the analysis illustrates the future research direction of the project towards a comprehensive solution approach for data sharing in a manufacturing ecosystem.
The design and development of smart products and services with data science enabled solutions forms a core topic of the current trend of digitalisation in industry. Enabling skilled staff, employees, and students to use data science in their daily work routine of designing such products and services is a key concern of higher education institutions, including universities, company workshop providers and in further education. The scope and usage scenario of this paper is to assess software modules (‘tools’) for integrated data and analytics as service (DAaaS). The tools are usually driven by machine learning, may be deployed in cloud infrastructures, and are specifically targeted at particular needs of the industrial manufacturing, production, or supply chain sector.
The paper describes existing theories and previous work, namely methods used in didactics, work done for visually designing and using machine learning algorithms (no-code / low- code tools), as well as combinations of these two topics. For tools available on the market, an extended assessment of their suitability for a set of learning scenarios and personas is discussed.
Smart services disrupt business models and have the potential to stimulate the circular economy transition of regions, enabling an environmentally friendly atmosphere for sustainable and innovation-driven growth of regions. Although smart services are powerful means for deploying circular economy goals in industrial practices, there is little systematic guidance on how the adoption of smart services could improve resource efficiency and stimulate smart regional innovation-driven growth, enabled through circular design. Implemented in the scope of Vorarlberg’s smart specialization strategy, this paper contributes to the literature on the circular economy and regional innovation-driven growth by assessing critical factors of the value creation and value capture implemented within the scope of the quadruple helix system. By identifying the main challenges and opportunities of collaborative value creation and value capture in setting-up smart circular economy strategies and by assessing the role of innovation actors within the quadruple helix innovation system, the study provides recommendations and set of guidelines for managers and public authorities in managing circular transition. Finally, based on the analysis of the role of actors in creating shared value and scaling-up smart circular economy practices in the quadruple helix innovation systems, the paper investigates the role of banks as enablers of circular economy innovation-driven regional growth and smart value creation.
Small and medium-sized enterprises often face resource deficits and there- fore depend on cooperating with other actors to stay innovative in a competitive environment. Establishing and maintaining actual co-creation and service inter- action strategies however is challenging. A reason for this is the complexity of finding methodologies and tools to create valuable outcome and the lack of knowledge of collaboration toolsets, also in virtual environments. This paper introduces an Innovation-Method-Framework consisting of innovation methods for increased service interaction and value co-creation among service stakeholders. Also, toolsets for the framework’s practical application are provided.
Recent developments in the area of Natural Language Processing (NLP) increasingly allow for the extension of such techniques to hitherto unidentified areas of application. This paper deals with the application of state-of-the-art NLP techniques to the domain of Product Safety Risk Assessment (PSRA). PSRA is concerned with the quantification of the risks a user is exposed to during product use. The use case arises from an important process of maintaining due diligence towards the customers of the company OMICRON electronics GmbH.
The paper proposes an approach to evaluate the consistency of human-made risk assessments that are proposed by potentially changing expert panels. Along the stages of this NLP-based approach, multiple insights into the PSRA process allow for an improved understanding of the related risk distribution within the product portfolio of the company. The findings aim at making the current process more transparent as well as at automating repetitive tasks. The results of this paper can be regarded as a first step to support domain experts in the risk assessment process.