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Introducing 3D sub-micrometer technologies based on polymers opened new possibilities of design and fabrication of photonic devices and components in 3D arrangement. 3D laser lithography is direct writing process based on two photon polymerization exhibiting high accuracy and versatility, where numerous resists and even polymer ceramic mixtures can be used. We present design and simulation of polymer based photonic components with a focus on arrayed waveguide gratings (AWG) based on optical multiplexers/demultiplexers and optical splitters. All optical components were designed for 1550 nm operating wavelength, applying two commercial photonics tools. This study creates a basis for the design of optical components in 3D arrangement, which will be fabricated by 3D laser lithography.
Lead–magnesium niobate lead titanate (PMN-PT) has been proven as an excellent material for sensing and actuating applications. The fabrication of advanced ultra-small PMN-PT-based devices relies on the availability of sophisticated procedures for the micro-machining of PMN-PT thin films or bulk substrates. Approaches reported up to date include chemical etching, excimer laser ablation, and ion milling. To ensure an excellent device performance, a key mandatory feature for a micro-machining process is to preserve as far as possible the crystalline quality of the substrates; in other words, the fabrication method must induce a low density of cracks and other kind of defects. In this work, we demonstrate a relatively fast procedure for the fabrication of high-quality PMN-PT micro-machined actuators employing green femtosecond laser pulses. The fabricated devices feature the absence of extended cracks and well-defined edges with relatively low roughness, which is advantageous for the further integration of nanomaterials onto the piezoelectric actuators.
Investigations on mechanical stability of laser machined optical fibre tips for medical application
(2019)
Light delivery is a challenging task, when it comes to medical applications. The light is guided through optical fibers from the light source towards the treatment region. In case of interstitial light application, the light has to be decoupled from the fibre and spread to the surrounding tissue. To reach larger tissue volumes, this can be either obtained by adding a scattering volume to the tip of the fibre, or by directly modifying the optical fibre itself in order to break the total reflection within the fibre core. Such modifications can be either on the fibre surface itself or internally in the fibre core. One approach to obtain the fibre structuring could be laser induced surface roughening using an ultrafast laser source. While using volume scattering as diffusor at the fibre tip is currently the gold standard for non-thermal applications (< 0.3W/cm), the decoupling of high power laser intensities for thermal treatment options is still challenging. Structuring the fibre core itself usually is related with a loss of mechanical stability. As fibre breakage and potential loss within the human body can have serious consequences, the mechanical stability is one of the quality criterion in diffuser manufacturing. Therefore, investigations about the mechanical stability of laser manufactured optical fibre diffusers are needed.
In order to evaluate the mechanical stability, a 4-point as well as a 2-point breaking test were developed. Different fibre diffusers, based on volume or surface scattering, were manufactured using fs-laser ablation techniques and its breaking strengths were investigated.
It could be shown that for surface fibre modifications, the mechanical stability reduces with increasing defect depth. The stability significantly drops when the laser ablation was performed in the thermal energy range. Volume scattering modified fibres only showed a slight reduction in stability compared to un-machined fibres.
In conclusion, internal fibre modification seems to be the most promising method to establish optical fibre diffusers, which are capable of several watts of emission power, while preserving its mechanical strength.
Production and tribological characterization of tailored laser-induced surface 3D microtextures
(2019)
We present the technological verification of a size-optimized 160-channel, 50-GHz silicon nitride-based AWG-spectrometer. The spectrometer was designed for TM-polarized light with a central wavelength of 850 nm applying our proprietary “AWG-Parameters” tool. For the simulations of AWG layout, the WDM PHASAR photonics tool from Optiwave was used. The simulated results show satisfying optical properties of the designed AWG-spectrometer. However, the high-channel count causes a large AWG size with standard design approaches. To solve this problem we designed a special taper enabling the reduction of AWG structure by about 15% while keeping the same optical properties. The AWG design was fabricated and the measured spectra not only confirm the proposed size-reduction but also the improvement of optical properties of the size-optimized AWG.
The photonic integrated circuits are required in the next generations of coherent terabit optical communications. The software tools for automated adjustment and coupling of optical fiber arrays to photonic integrated circuits has been developed. The obtained results are needed in final production phase in the technology process of photonic integrated circuits packaging.
We present design and simulation of 16-channel, 100-GHz silicon nitride based AWG using BeamPROP simulation engine of RSoft photonic tool. The AWG was designed for TM-polarized light with central wavelength of 850 nm. The input design parameters were calculated applying AWG-Parameters tool. For this purpose, we created a ridge waveguide structure, used in the design of the AWG layout, and performed FEM simulation. The output of the BPM simulation of AWG structure are the transmission characteristics, which was used to calculate transmission parameters defining optical properties of simulated AWG. The achieved simulation results are in a good agreement with the design.
Comparison of silicon nitride based 8-channel 100-GHz AWGs applying different waveguide structures
(2019)
This paper presents design and simulation of 8-channel, 100-GHz AWGs based on Si/SiO2/SiN/SiOx material platform. For the designs, two different waveguide structures were used, i.e. ridge and rib waveguides. AWGs were designed for central wavelength of 850 nm applying AWG-Parameters tool. The simulations were performed applying FEM and BPM methods in RSoft and PHASAR photonic tools. The simulation results show considerably lower losses but slightly higher channel crosstalk when applying rib waveguides.
We report resent results on the fabrication and characterization of carbon nanogap interdigitated electrode arrays (IDAs) for biosensor applications based on redox cycling. The electrochemical results of the carbon electrodes are compared to our fabricated gold electrodes with similar nanogap distances. The amplification factor and the collection efficiency were recorded by chronoamperometry. Cyclic voltammetry (CV) was utilized to determine the oxidation and reduction potentials as well as for monitoring the electron transfer process. The different deposited carbon materials were characterized by Raman spectroscopy.At present, we successfully fabricated carbon nanogaps down to 80 nm and we are convinced to reach the present fabrication limit of about 30 nm (for gold and platinum electrodes) with carbon as electrode material as well. To the best of our knowledge, this is the first IDA nanogap sensor, which features a gap distance under 100 nm with amorphous carbon as electrode material. Moreover, we present a signal amplification of 32 for carbon electrodes by redox cycling, which is the highest reported amplification so far.
Comparison of silicon nitride based 1x8 Y-branch splitters applying different waveguide structures
(2019)
This paper presents design, simulation and optimization of 1x8 Y-branch power splitters based on Si/SiO2/SiN/SiOx material platform. For the designs, two different waveguide structures were used, i.e. ridge and rib waveguides. The splitters were designed for 850 nm spectral optical window and the simulations were performed applying FEM and BPM methods in RSoft photonic tool. The aim of this work was to find minimum physical dimensions of the designed splitters occupying minimal space on PIC chip. The optimization was done with regards to high symmetrical splitting ratio and low insertion loss. Finally, the optical properties of both splitters were studied and compared with each other.
Compact and high-resolution 256-channel silicon nitride based AWG-spectrometer for OCT on a chip
(2019)
We present design, simulation and technological verification of a compact 256-channel, 42-GHz silicon nitride based AWG-spectrometer. The spectrometer was designed for TM-polarized light with a central wavelength of 850 nm, applying “AWG-Parameters” tool. This design is based on a previous study of various AWG designs (8-channel, 100-GHz; 20-channel, 50-GHz; 40-channel, 50-GHz, 80-channel, 50-GHz and 160-channel, 50-GHz AWGs), which were all technologically verified. The spectrometer features small size and high resolution. It is integrated on OCT chip using standard CMOS processes. The SD-OCT system is developed to operate in a wavelength range from 800 nm to 900 nm, having 0.1 nm resolution.
Here we present the highly sensitive detection of dopamine using gold nanogap IDAs with redox-cycling amplification. Through the combination with a facile electrochemical activation and a chronoamperometric multistep protocol fouling of the gold electrode surface can be prevented and a sensitivity of 14 nA μM -1 with excellent linearity up to 10 μM is achieved. The low-cost and reproducible wafer level fabrication process of the nanogap IDAs plays a key role. Electrode and substrate materials can be nearly arbitrarily chosen. Also the gap sizes could be adjusted down to sub-100 nm dimensions with this versatile approach, allowing for very high signal amplification. In comparison to the current gold standard, fastscan cyclic voltammetry (FSCV) with carbon fiber microelectrodes (CFMEs), which suffers from high background currents, no elaborate data processing and high-end electronic equipment is needed. Employing our flexible, easy and inexpensive method, DA monitoring with a short acquisition period and a detection limit less than 200 nM is successfully demonstrated.
Abstract: ams AG is a leading provider of sensing solutions developing semiconductor sensors in a wide variety of fields, with optical sensing as one of the key competences. Since integrated photonics is a promising technology for new sensor systems, ams AG has been developing processes for fully integrated CMOS-compatible photonic components based on Si3N4. This talk will provide an overview on the processing of basic photonic building blocks and their optical properties and performance. We will also give examples for applications in the fields of optical coherence tomography and opto-chemical gas sensing. In the 1980s photonics started its way for common use in telecommunication technology, using optical fiber technologies. In recent years, also a variety of photonic sensors has been proposed and developed. One of the major drawbacks of most of these photonic devices has been the lack of integration into existing (semiconductor) production processes, so far. This integration is feasible using SiN material systems to process monolithically integrated CMOS-compatible photonic sensors in the visible and near-infrared spectrum. We will present the basic processing steps for the SiN photonic technology, the development of some critical processing steps such as SiN deposition and SiN etching as well as several photonic components (waveguides, splitters, etc.) with their optical properties. One of the applications presented relates to optical coherence tomography (OCT), a fast growing imaging technique in ophthalmology. Drawbacks of existing OCT systems are their high costs as well as their bulkiness, which prevents a wider spread use of OCT systems.
One way to overcome both cost and size issues is to integrate optical and electrical components on a single chip.
Part of this work was carried out in the framework of the projects COHESION (funded by the Austrian Research Promotion Agency (FFG), no. 848588), OCTCHIP (funded by the EU’ Horizon 2020 research and innovation programme, no. 688173), and COLODOR (M-ERA.NET transnational Call 2015, funded by the Austrian Research Promotion Agency (FFG), no.854066, and the Bundesministerium für Bildung und Forschung, Germany).
Interstitial photodynamic therapy (iPDT) treats malignant brain cancer cells by irradiation with low power laser light. The light is guided into the human body by diffuse emitting fibers. This study targets the light distribution of optical diffusers within the brain tissue. It was shown, that by submerging an optical diffuser into human brain phantom, its radiation profile measured in air converges towards a Gaussian distribution with increasing phantom depth. A camera method using digital averaging filters as well as an integrating sphere setup, both, smoothing the diffuser radiation profile were applied onto the evaluated diffuser.