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The properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 μm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.
The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We innovated specific laser ablation techniques to fabricate membranes and cantilevers made of SiC or nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates by microwave chemical vapour deposition (MWCVD). We started research to generate surface moulds to grow corrugated diamond films for membranes and cantilevers. A software tool was developed to support the design of micromechanical cantilevers. We can measure deformation and resonant frequency of diamond cantilevers and identify the global mechanical properties. A benchmark against finite element simulations enables an inverse identification of the specific system parameters and simplifies the characterization procedure.
By a simple femtosecond laser process, we fabricated metal-oxide/gold composite films for electrical and optical gas sensors. We designed a dripple wavelength AWG-spectrometer, matched to the plasma absorption wavelength region of the composite films. H2/CO absorptions fit well with the AWG design for multi gas detection sensor arrays
Semiconducting metal oxides are widely used for solar cells, poto-catalysis, bio-active materials and gas sensors. Besides the material properties of the used semiconductor,the specific surface topology of the sensor determines the device performance. We investigate the preparation and transfer suitable metals onto LIPPS structures on glass for gas sensing applications.
Parametric anti-resonance is a phenomenon that occurs in systems with at least two degrees of freedom; this can be achieved by periodically exciting some parameters of the system. The effect of this properly tuned periodicity is to increase the dissipation in the system, which leads to a raising in the effective damping of vibrations. This contribution presents the design of an open-loop control to reduce the settling time using the anti-resonance concept. The control signal consists of a quasi-periodic signal capable of transferring the system’s oscillations from one mode to another mode of the system. The general averaging technique is used to characterize the dynamics, particularly the so-called slow dynamics of motion. With this analysis, the control signal is designed for the potential application of a microelectromechanical sensor arrangement; for this specific example, up to 96.8% reduction of settling time is achieved.