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Author
Brendel, Rolf
(1)
Choleva, Pavlina
(2)
Dezhdar, Tara
(1)
Domke, Matthias
(3)
Dzuba, Jaroslav
(2)
Eiselen, Sasia
(1)
Farsari, Maria
(1)
Fotakis, Costas
(1)
Harder, Nils-Peter
(1)
Heise, Gerhard
(1)
Hermann, Sonja
(1)
Hotovy, Ivan
(1)
Huber, Heinz P.
(2)
Hudek, Peter
(1)
Kutis, Vladimir
(1)
Lalinsky, Tibor
(2)
Matylitsky, Victor
(1)
Merz, Robert
(2)
Mikolasek, Miroslav
(1)
Nobile, Luigi
(1)
Rapp, Stephan
(2)
Rehacek, Vlastimil
(1)
Reider, Georg A.
(3)
Rosenberger, Janosch
(1)
Ryger, Ivan
(2)
Schmidt, Michael
(2)
Seibt, Michael
(1)
Sotrop, Jürgen
(1)
Stangl, Günther
(1)
Stroj, Sandra
(2)
Vallo, Martin
(1)
Vanko, Gabriel
(2)
Zehetner, Johann
(6)
Zoppel, Sandra
(3)
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Article
(7)
Conference Proceeding
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Forschungszentrum Mikrotechnik
(10)
Josef Ressel Zentrum für Materialbearbeitung
(2)
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English (10)
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Laser ablation (10)
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Title
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Bulk micromachining of SiC substrate for MEMS sensor applications
(2013)
Vanko, Gabriel
;
Hudek, Peter
;
Zehetner, Johann
;
Dzuba, Jaroslav
;
Choleva, Pavlina
;
Kutis, Vladimir
;
Vallo, Martin
;
Ryger, Ivan
;
Lalinsky, Tibor
Enhancement of laser ablation yield by two color excitation
(2005)
Zoppel, Sandra
;
Merz, Robert
;
Zehetner, Johann
;
Reider, Georg A.
Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiNx layers
(2010)
Hermann, Sonja
;
Dezhdar, Tara
;
Harder, Nils-Peter
;
Brendel, Rolf
;
Seibt, Michael
;
Stroj, Sandra
Laser micro machining of 3C-SiC single crystals
(2006)
Zoppel, Sandra
;
Farsari, Maria
;
Merz, Robert
;
Zehetner, Johann
;
Stangl, Günther
;
Reider, Georg A.
;
Fotakis, Costas
Preparation of laser induced periodic surface structures to increase the surface area for NiO and TiO2 gas sensing thin films
(2021)
Zehetner, Johann
;
Hotovy, Ivan
;
Mikolasek, Miroslav
;
Rehacek, Vlastimil
Surface ablation efficiency and quality of fs lasers in single-pulse mode, fs lasers in burst mode, and ns lasers
(2019)
Domke, Matthias
;
Matylitsky, Victor
;
Stroj, Sandra
Two color laser ablation: enhanced yield, improved machining
(2007)
Zoppel, Sandra
;
Zehetner, Johann
;
Reider, Georg A.
Ultrafast pump-probe microscopy reveals the mechanism of selective fs laser structuring of transparent thin films for maskless micropatterning
(2014)
Rapp, Stephan
;
Rosenberger, Janosch
;
Domke, Matthias
;
Heise, Gerhard
;
Huber, Heinz P.
;
Schmidt, Michael
Understanding thin film laser ablation. The role of the effective penetration depth and the film thickness
(2014)
Domke, Matthias
;
Nobile, Luigi
;
Rapp, Stephan
;
Eiselen, Sasia
;
Sotrop, Jürgen
;
Huber, Heinz P.
;
Schmidt, Michael
Using of laser ablation technique in the processing technology of GaN/SiC based MEMS for extreme conditions
(2014)
Zehetner, Johann
;
Vanko, Gabriel
;
Choleva, Pavlina
;
Dzuba, Jaroslav
;
Ryger, Ivan
;
Lalinsky, Tibor
1
to
10