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Author
Vallo, Martin (3)
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Year of publication
2013
(2)
2011
(1)
Document Type
Conference Proceeding
(2)
Article
(1)
Institute
Forschungszentrum Mikrotechnik
(3)
Language
English
(3)
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(3)
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Keywords
AlGaN/GaN HEMT
(1)
Bulk micromachining
(1)
Laser ablation
(1)
SiC MEMS
(1)
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Micromachined pressure sensors based on AlGaN/GaN circular HEMT sensing devices. Poster
(2011)
Lalinsky, Tibor
;
Hudek, Peter
;
Vanko, Gabriel
;
Choleva, Pavlina
;
Vallo, Martin
;
Drzik, Milan
;
Dzuba, Jaroslav
;
Kutis, Vladimir
;
Matay, Ladislav
;
Kostic, Ivan
Bulk micromachining of SiC substrate for MEMS sensor applications
(2013)
Vanko, Gabriel
;
Hudek, Peter
;
Zehetner, Johann
;
Dzuba, Jaroslav
;
Choleva, Pavlina
;
Kutis, Vladimir
;
Vallo, Martin
;
Ryger, Ivan
;
Lalinsky, Tibor
MEMS pressure sensor fabricated by advanced bulk micromachining techniques
(2013)
Vanko, Gabriel
;
Hudek, Peter
;
Zehetner, Johann
;
Dzuba, Jaroslav
;
Choleva, Pavlina
;
Vallo, Martin
;
Ryger, Ivan
;
Lalinsky, Tibor
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3