Deutsch
Open Access
Home
Search
Browse
Publish
FAQ
Volltext-Downloads (blau) und Frontdoor-Views (grau)
Schließen
Refine
Author
Egle, Bernadette (3)
(remove)
Year of publication
2017
(1)
2016
(1)
2015
(1)
Document Type
Article
(2)
Conference Proceeding
(1)
Institute
Forschungszentrum Mikrotechnik
(3)
Josef Ressel Zentrum für Materialbearbeitung
(3)
Language
English
(3)
Has Fulltext
no
(3)
Is part of the Bibliography
yes
(3)
3
search hits
1
to
3
Export
BibTeX
CSV
Marc21
RIS
10
10
20
50
100
Sort by
Year
Year
Title
Title
Author
Author
Controlling depth and distance of the hole formations at the bottom of laser-scribed trenches in silicon using fs-pulses
(2015)
Domke, Matthias
;
Egle, Bernadette
;
Piredda, Giovanni
;
Fasching, Gernot
;
Bodea, Marius
;
Schwarz, Elisabeth
Ultrashort pulse laser dicing of thin Si wafers. The influence of laser-induced periodic surface structures on the backside breaking strength
(2016)
Domke, Matthias
;
Egle, Bernadette
;
Piredda, Giovanni
;
Stroj, Sandra
;
Fasching, Gernot
;
Bodea, Marius
;
Schwarz, Elisabeth
Ultrafast-laser dicing of thin silicon wafers: strategies to improve front- and backside breaking strength
(2017)
Domke, Matthias
;
Egle, Bernadette
;
Stroj, Sandra
;
Bodea, Marius
;
Schwarz, Elisabeth
;
Fasching, Gernot
1
to
3